Thin Film Materials Technology: Sputtering of Compound Materials
| By: | Wasa, Kiyotaka; Kitabatake, Makoto; Adachi, Hideaki |
| Publisher: | Elsevier S & T |
| Print ISBN: | 9780815514831 |
| eText ISBN: | 9780815519317 |
| Edition: | 0 |
| Format: | Page Fidelity |
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